{"id":63002,"date":"2023-02-09T17:16:27","date_gmt":"2023-02-09T09:16:27","guid":{"rendered":"https:\/\/www.cnledw.com\/?p=63002"},"modified":"2023-02-10T16:22:24","modified_gmt":"2023-02-10T08:22:24","slug":"gan%ef%bc%8c%e8%bf%8e%e6%9d%a5%e6%96%b0%e7%aa%81%e7%a0%b4","status":"publish","type":"post","link":"https:\/\/www.cnledw.com\/GaN\/newsdetail-63002.html","title":{"rendered":"GaN\uff0c\u8fce\u6765\u65b0\u7a81\u7834"},"content":{"rendered":"

\u5982\u4eca\uff0c\u4ee5\u78b3\u5316\u7845\uff08SiC\uff09\u3001\u6c2e\u5316\u9553\uff08GaN\uff09\u7b49\u201cWBG\uff08Wide Band Gap\uff0c\u5bbd\u7981\u5e26\uff0c\u4ee5\u4e0b\u7b80\u79f0\u4e3a\uff1aWBG\uff09\u201d\u65b0\u578b\u6750\u6599\u4e3a\u57fa\u7840\u7684\u529f\u7387\u534a\u5bfc\u4f53\u7684\u7814\u53d1\u6280\u672f\u9887\u53d7\u5173\u6ce8\u3002\u57fa\u4e8e\u65e5\u672c\u73af\u5883\u7701\u7684\u201c\u4e3a\u8fdb\u4e00\u6b65\u5b9e\u73b0\u78b3\u4e2d\u548c\uff0c\u52a0\u901f\u63a8\u8fdb\u5e94\u7528\u548c\u666e\u53ca\u6750\u6599\uff08\u6c2e\u5316\u9553\uff09\u3001CNF\uff08\u78b3\u7eb3\u7c73\u7ea4\u7ef4\uff09\u201d\u7684\u65b9\u9488\uff0c\u65e5\u672c\u5927\u962a\u5927\u5b66\u68ee\u52c7\u4ecb\u6559\u6388\u4e00\u76f4\u81f4\u529b\u4e8e\u4ee5\u9ad8\u8d28\u91cf\u6676\u5706\u4e3a\u57fa\u7840\u7684\u534a\u5bfc\u4f53\u7814\u53d1\u5de5\u4f5c\uff0c\u6b64\u6b21\uff0c\u9488\u5bf9\u6c2e\u5316\u9553\u7814\u53d1\u60c5\u51b5\u3001\u7814\u53d1\u6210\u679c\u5bf9\u672a\u6765\u529f\u7387\u534a\u5bfc\u4f53\u5e94\u7528\u573a\u666f\u7684\u5f71\u54cd\u7b49\uff0c\u6211\u4eec\u5bf9\u68ee\u6559\u6388\u8fdb\u884c\u4e86\u91c7\u8bbf\u3002<\/p>\n

\u5982\u4eca\u91c7\u7528\u4e86\u5bbd\u7981\u5e26\u6750\u6599\u7684\u529f\u7387\u534a\u5bfc\u4f53\u5df2\u7ecf\u5f00\u59cb\u5b9e\u7528\u5316\u3002\u636e\u6089\uff0c\u7f8e\u56fd\u7279\u65af\u62c9\uff08Tesla\uff09\u7684\u7535\u673a\uff08Motor\uff09\u9a71\u52a8\u9006\u53d8\u5668\uff08Inverter\uff09\u91c7\u7528\u4e86\u78b3\u5316\u7845\u534a\u5bfc\u4f53\u3002\u6b64\u5916\uff0c\u5e94\u8be5\u4e5f\u6709\u4e0d\u5c11\u8bfb\u8005\u5728\u5bb6\u7535\u9500\u552e\u4e2d\u5fc3\u7b49\u5904\u89c1\u8fc7\u4e00\u4e9b\u91c7\u7528\u4e86\u6c2e\u5316\u9553\u534a\u5bfc\u4f53\u7684\u6781\u5c0f\u578b\u4ea4\u6d41\u8f6c\u6362\u5668\uff08AC Converter\uff09\u3002\u5728\u9ad8\u7535\u538b\u5de5\u4f5c\u60c5\u51b5\u4e0b\uff0c\u4ee5\u5bbd\u7981\u5e26\u6750\u6599\u5236\u6210\u7684\u529f\u7387\u534a\u5bfc\u4f53\u7684\u5185\u90e8\u7ebf\u8def\u7684\u7535\u6c14\u6027\u80fd\u548c\u6709\u6548\u6027\u8fdc\u8fdc\u9ad8\u4e8e\u7845\u6750\u8d28\u7684\u4f20\u7edf\u534a\u5bfc\u4f53\u3002<\/p>\n

\u5bf9\u5df2\u7ecf\u5b9e\u73b0\u5b9e\u7528\u5316\u7684\u78b3\u5316\u7845\u534a\u5bfc\u4f53\u548c\u6c2e\u5316\u9553\u534a\u5bfc\u4f53\u800c\u8a00\uff0c\u5e94\u7528\u7ec8\u7aef\u5bf9\u5176\u8010\u7535\u538b\uff08Rated Voltage\uff0c\u6bd4\u989d\u5b9a\u7535\u538b\u9ad8\uff0c\u662f\u4e3a\u7ef4\u6301\u4fe1\u8d56\u6027\u7684\u57fa\u672c\u7535\u538b\uff09\u7684\u8981\u6c42\u4e0d\u540c\uff0c\u5206\u522b\u5982\u4e0b\uff0c\u78b3\u5316\u7845\u8010\u7535\u538b1000V\u4ee5\u4e0a\uff0c\u6c2e\u5316\u9553\u8010\u7535\u538b1000V\u4ee5\u4e0b\u3002\u57fa\u4e8e\u4e0a\u8ff0\u533a\u5206\uff0c\u529f\u7387\u534a\u5bfc\u4f53\u5382\u5bb6\u548c\u7814\u53d1\u4f01\u4e1a\u4e4b\u95f4\u5f62\u6210\u4e86\u201c\u65e0\u8a00\u7684\u9ed8\u5951\u201d\u3002<\/p>\n

\u7136\u800c\uff0c\u4e0a\u8ff0\u60c5\u51b5\u5f88\u6709\u53ef\u80fd\u53d1\u751f\u53d8\u5316\u3002\u7531\u4e8e\u6c2e\u5316\u9553\u6750\u6599\u53ef\u5927\u5e45\u5ea6\u964d\u4f4e\u6676\u5706\u7684\u7f3a\u9677\uff08\u9519\u4f4d\uff09\u5bc6\u5ea6\uff0c\u56e0\u6b64\u53ef\u4ee5\u63d0\u9ad8\u5e94\u7528\u7ec8\u7aef\u7684\u6027\u80fd\u3001\u6548\u7387\uff0c\u4e14\u8fdc\u4f18\u4e8e\u78b3\u5316\u7845\u6750\u6599\uff0c\u6240\u4ee5\uff0c\u6c2e\u5316\u9553\u6709\u671b\u5b9e\u73b0\u5927\u8303\u56f4\u91cf\u4ea7\u3002\u5982\u4eca\uff0c\u7814\u53d1\u4eba\u5458\u6b63\u5728\u52aa\u529b\u79ef\u7d2f\u76f8\u5173\u6570\u636e\uff0c\u4ee5\u8bc1\u5b9e\u4e0a\u8ff0\u7ed3\u8bba\u3002\u65e5\u672c\u5927\u962a\u5927\u5b66\u7684\u68ee\u52c7\u4ecb\u6559\u6388\u4f4d\u4e8e\u4e0a\u8ff0\u7814\u53d1\u6d3b\u52a8\u7684\u6700\u524d\u6cbf\u3002<\/p>\n

\u6c2e\u5316\u9553\u529f\u7387\u534a\u5bfc\u4f53\u867d\u7136\u9002\u7528\u6027\u6781\u9ad8\uff0c\u4f46\u4f9d\u7136\u9762\u4e34\u4e09\u9879\u793e\u4f1a\u95ee\u9898<\/strong><\/p>\n

\u4ec5\u4ece\u7269\u7406\u7279\u6027\u6765\u770b\uff0c\u6c2e\u5316\u9553\u6bd4\u78b3\u5316\u7845\u66f4\u9002\u5408\u505a\u529f\u7387\u534a\u5bfc\u4f53\u7684\u6750\u6599\u3002<\/p>\n

\u7814\u53d1\u4eba\u5458\u8fd8\u6bd4\u8f83\u4e86\u78b3\u5316\u7845\u548c\u6c2e\u5316\u9553\u7684\u201cBaliga\u6027\u80fd\u6307\u6570\uff08\u534a\u5bfc\u4f53\u6750\u6599\u76f8\u5bf9\u4e8e\u7845\u7684\u6027\u80fd\u6570\u503c\uff0c\u5373\u7845\u4e3a1\uff09\u201d\uff0c4H-SiC\u4e3a500\uff0c\u6c2e\u5316\u9553\u4e3a900\u3001\u6548\u7387\u6781\u9ad8\u3002\u6b64\u5916\uff0c\u78b3\u5316\u7845\u7684\u7edd\u7f18\u7834\u574f\u7535\u573a\u5f3a\u5ea6\uff08\u8868\u793a\u6750\u6599\u7684\u8010\u7535\u538b\u7279\u6027\uff09\u4e3a2.8MV\/cm\uff0c\u6c2e\u5316\u9553\u66f4\u9ad8\uff0c\u4e3a3.3MV\/cm\u3002\u4e00\u822c\u60c5\u51b5\u4e0b\uff0c\u4f4e\u9891\u5de5\u4f5c\u65f6\u7684\u529f\u8017\u635f\u5931\u662f\u7edd\u7f18\u7834\u574f\u7535\u573a\u7684\u4e09\u6b21\u65b9\uff0c\u9ad8\u9891\u5de5\u4f5c\u65f6\u7684\u529f\u8017\u635f\u5931\u662f\u7edd\u7f18\u7834\u574f\u7535\u573a\u76842\u6b21\u65b9\uff0c\u6210\u53cd\u6bd4\u4f8b\u5173\u7cfb\uff0c\u6240\u4ee5\uff0c\u6c2e\u5316\u9553\u7684\u529f\u7387\u635f\u8017\u66f4\u4f4e\uff08\u5de5\u4f5c\u6548\u7387\u66f4\u9ad8\uff09\u3002<\/p>\n

\u90a3\u4e48\uff0c\u4e3a\u4ec0\u4e48\u5728\u8010\u9ad8\u7535\u538b\u5e94\u7528\u9886\u57df\uff0c\u78b3\u5316\u7845\u7684\u5b9e\u7528\u5316\u65e9\u4e8e\u6c2e\u5316\u9553\u5462\uff1f\u7406\u7531\u5982\u4e0b\uff0c\u5728\u5236\u4f5cMOS FET\u65f6\uff0c\u78b3\u5316\u7845\u66f4\u6613\u4e8e\u5f62\u6210\u4e8c\u6c27\u5316\u7845\uff08SiO2\uff09\u3001\u201c\u6c2e\u5316\u9553\u6676\u5706\u9762\u4e34\u4e09\u5927\u95ee\u9898\u70b9\u201d\uff08\u68ee\u6559\u6388\uff09\u3002\uff08\u4e0b\u56fe1\uff09<\/p>\n

\"\"
<\/figcaption><\/figure>\n

\u56fe1\uff1a\u65e5\u672c\u5927\u962a\u5927\u5b66\u68ee\u52c7\u4ecb\u5217\u4e3e\u7684\u6c2e\u5316\u9553\u6676\u5706\u9762\u4e34\u7684\u95ee\u9898\u70b9\u3002<\/p>\n

\uff08\u56fe\u7247\u51fa\u81ea\uff1a\u65e5\u672c\u5927\u962a\u5927\u5b66\uff09<\/p>\n

\u7b2c\u4e00\u4e2a\u95ee\u9898\uff0c\u7531\u4e8e Bulk Wafer\uff08\u6c2e\u5316\u9553\u4f53\u5757\uff09\u7684\u5c3a\u5bf8\u8f83\u5c0f\uff0c\u56e0\u6b64\u4e4b\u524d\u4ec5\u80fd\u751f\u4ea7\u51fa\u4f4e\u6210\u672c\u7684\u6676\u5706\u4ea7\u54c1\uff0c\u67d0\u4e9b\u4ea7\u54c1\u751a\u81f3\u65e0\u6cd5\u6ee1\u8db3\u6d4b\u8bd5\u8981\u6c42\u3002\u4e00\u76f4\u4ee5\u6765\uff0c\u90fd\u4ec5\u80fd\u751f\u4ea7\u51fa2\u82f1\u5bf8\u6676\u5706\uff0c\u5982\u4eca\u7ec8\u4e8e\u53ef\u4ee5\u751f\u4ea7\u51fa4\u82f1\u5bf8\u6676\u5706\u3002\u4e1a\u754c\u666e\u904d\u8ba4\u4e3a\u53ea\u67096\u82f1\u5bf8\u4ee5\u4e0a\u7684\u5927\u5c3a\u5bf8\u6676\u5706\u624d\u53ef\u4ee5\u6ee1\u8db3\u529f\u7387\u534a\u5bfc\u4f53\u7684\u6279\u91cf\u751f\u4ea7\u9700\u6c42\uff0c\u6240\u4ee5\u5982\u4eca\u8fd8\u6ca1\u6709\u8fbe\u5230\u53ef\u4ee5\u91cf\u4ea7\u7684\u8981\u6c42\u3002\u53e6\u5916\uff0c\u4e0a\u6587\u4e2d\u63d0\u5230\u7684\u5c0f\u578b\u4ea4\u6d41\u8f6c\u6362\u5668\uff08AC Converter\uff09\u6240\u91c7\u7528\u7684\u6c2e\u5316\u9553\u529f\u7387\u534a\u5bfc\u4f53\u91c7\u7528\u7684\u6676\u5706\u5982\u4e0b\uff0c\u5728\u6700\u5927\u5c3a\u5bf8\u4e3a6\u82f1\u5bf8\u7684\u7845\uff08Si\uff09\u886c\u5e95\u4e0a\u5f62\u6210\u6c2e\u5316\u9553\u5c42\u3002\u4f46\u662f\uff0c\u7531\u4e8e\u7845\u548c\u6c2e\u5316\u9553\u7684\u7ed3\u6676\u5e38\u6570\uff08Lattice Constant\uff09\u4e0d\u540c\uff0c\u56e0\u6b64\u6c2e\u5316\u9553\u5c42\u7684\u7f3a\u9677\u5bc6\u5ea6\u8f83\u9ad8\u3001\u65e0\u6cd5\u5f62\u6210\u53ef\u4ee5\u6ee1\u8db3\u8010\u9ad8\u7535\u538b\u3001\u5927\u7535\u6d41\u7684\u7eb5\u578bFET\uff0c\u4e5f\u65e0\u6cd5\u5236\u4f5c\u9ad8\u6027\u80fd\u7684\u6a2a\u578bHEMT\u3002<\/p>\n

\u7b2c\u4e8c\u4e2a\u95ee\u9898\uff0c\u4f5c\u4e3a\u7ed3\u4f53\u5757\u5f0f\uff08Bulk\uff09\u7684\u6c2e\u5316\u9553\u6676\u5706\u672c\u8eab\u8d28\u91cf\u4e0d\u9ad8\u3002\u5982\u4eca\u7684\u7ed3\u6676\u5757\u6676\u5706\u7684\u6700\u5927\u9519\u4f4d\u5bc6\u5ea6\u9ad8\u8fbe106\/\u5e73\u65b9\u5398\u7c73\uff0c\u8fd9\u79cd\u6c34\u5e73\u7684\u5bc6\u5ea6\u6c34\u5e73\u662f\u4e0d\u9002\u5408\u529f\u7387\u534a\u5bfc\u4f53\u751f\u4ea7\u7684\u3002\u4f46\u662f\uff0c2\u82f1\u5bf8\u6676\u5706\u7684\u503e\u659c\u89d2\uff08Off\uff09\u7684\u5206\u5e03\uff08\u662f\u53cd\u6620\u6676\u5706\u7fd8\u66f2\u5ea6\u7684\u6307\u6807\uff09\u4e3a0.2\u5ea6\uff0c\u5f88\u96be\u5b9e\u73b0\u5927\u5c3a\u5bf8\u5316\u548c\u4f4e\u6210\u672c\u5316\u3002\u4f46\u662f\uff0c\u4e0a\u8ff0\u4f4e\u8d28\u91cf\u7684\u6676\u5706\u9002\u5408\u7528\u4e8e\u5149\u5b66\u534a\u5bfc\u4f53\u7684\u751f\u4ea7\u3002\u4e0d\u8fc7\uff0c\u5bf9\u4e8e\u529f\u7387\u534a\u5bfc\u4f53\u800c\u8a00\uff0c\u7535\u6d41\u9700\u8981\u5728\u6676\u5706\u7684\u5927\u90e8\u5206\u533a\u57df\u6d41\u901a\uff0c\u6240\u4ee5\uff0c\u9519\u4f4d\u7f3a\u9677\u6210\u4e3a\u4e86\u8010\u9ad8\u7535\u538b\u3001\u7535\u6d41\u91cf\u3001\u751f\u4ea7\u826f\u7387\u4f4e\u7684\u4e3b\u8981\u539f\u56e0\u3002\u8981\u9002\u7528\u4e8e\u529f\u7387\u534a\u5bfc\u4f53\uff0c\u9700\u8981\u6ee1\u8db3\u4ee5\u4e0b\u9519\u4f4d\u5bc6\u5ea6\u8981\u6c42\uff1a\u8010\u9ad8\u7535\u538b\u8303\u56f4\u9700\u8981\u4e3a0.65\uff5e3.3kV\uff0c\u5355\u4e2a\u82af\u7247\uff08Chip\uff09\u7684\u7535\u6d41\u91cf\u4e3a100A\u4ee5\u4e0a\uff0c\u751f\u4ea7\u826f\u7387\u8981\u8fbe\u523090%\uff08\u5fc5\u987b\u5b9e\u73b0\u8f83\u4f4e\u7684\u9519\u4f4d\u7f3a\u9677\u3001\u8f83\u4f4e\u7684\u7fd8\u66f2\u5ea6\uff09\u3002<\/p>\n

\u7b2c\u4e09\u4e2a\u95ee\u9898\uff0c\u6676\u5706\u4ef7\u683c\u9ad8\u6602\u3002\u5982\u4eca\uff0c2\u82f1\u5bf8\u6676\u5706\u7684\u4ef7\u683c\u4e3a10\u4e07\u65e5\u5143\u4e00\u4e0020\u4e07\u65e5\u5143\uff08\u7ea6\u4eba\u6c11\u5e015220\u5143\u4e00\u4e0010440\u5143\uff09\u3002\u4e4b\u6240\u4ee5\u4ef7\u683c\u5982\u6b64\u9ad8\u6602\uff0c\u7406\u7531\u5982\u4e0b\uff1a\u8fd8\u6ca1\u6709\u786e\u7acb\u4e00\u9879\u6280\u672f\uff0c\u53ef\u4ee5\u4ee5\u8f83\u9ad8\u7684\u826f\u7387\u751f\u4ea7\u51fa\u5927\u5c3a\u5bf8\u6676\u5706\u3002\u5c3a\u5bf8\u4e3a6\u82f1\u5bf8\u3001\u4ef7\u683c\u572810\u4e07\u65e5\u5143\uff08\u7ea6\u4eba\u6c11\u5e015220\u5143\uff09\u4ee5\u4e0b\u7684\u6676\u5706\u624d\u9002\u7528\u4e8e\u529f\u7387\u534a\u5bfc\u4f53\u7684\u91cf\u4ea7\u3002<\/p>\n

\u6210\u529f\u83b7\u5f97\u9002\u7528\u4e8e\u91cf\u4ea7\u529f\u7387\u534a\u5bfc\u4f53\u7684\u3001\u9ad8\u8d28\u91cf\u3001\u5927\u5c3a\u5bf8\u6c2e\u5316\u9553\u6676\u5706<\/strong><\/p>\n

\u6c2e\u5316\u9553\u6676\u5706\u4e4b\u6240\u4ee5\u9762\u4e34\u4e0a\u8ff0\u95ee\u9898\u7684\u6839\u672c\u539f\u56e0\u5728\u4e8e\u6c2e\u5316\u9553\u7ed3\u6676\u7684\u751f\u957f\u65b9\u6cd5\u3002\u5982\u4eca\u91cf\u4ea7\u7684\u4f53\u5757\u5f0f\uff08Bulk\uff09\u6c2e\u5316\u9553\u6676\u5706\u7684\u5236\u4f5c\u65b9\u6cd5\u5982\u4e0b\uff0c\u5728\u84dd\u5b9d\u77f3\u886c\u5e95\uff08Sapphire\uff09\u4e0a\u7528\u4e00\u79cd\u540d\u4e3aHEPV\uff08Hydride Vapor Phase Epitaxial\uff0c\u6c22\u5316\u7269\u6c14\u76f8\u5916\u5ef6\u6cd5\uff0c\u4ee5\u4e0b\u7b80\u79f0\u4e3a\uff1a\u201cHVPE\u201d\uff09\u7684\u6c14\u76f8\u5916\u5ef6\u6cd5\u751f\u6210\u6c2e\u5316\u9553\u7ed3\u6676\u3002\u5982\u679c\u628a\u84dd\u5b9d\u77f3\u7b49\u7528\u4f5c\u7ed3\u6676\u751f\u957f\u7684\u57fa\u7840\u6750\u6599\uff0c\u7531\u4e8e\u6c2e\u84dd\u5b9d\u77f3\u6750\u6599\u4e0e\u6c2e\u5316\u9553\u7684\u7ed3\u6676\u5e38\u6570\uff08Lattice Constant\uff09\u4e0d\u540c\uff0c\u56e0\u6b64\u4f1a\u53d1\u751f\u5927\u6279\u91cf\u7684\u9519\u4f4d\u7f3a\u9677\u3002\u6b64\u5916\uff0c\u5229\u7528\u201cHVPE\u201d\uff0c\u7531\u4e8e\u662f\u57281000\u5ea6\u7684\u9ad8\u6e29\u4e0b\u751f\u6210\u7ed3\u6676\u7684\uff0c\u6240\u4ee5\u5728\u751f\u957f\u540e\u5e38\u6e29\u51b7\u5374\u65f6\uff0c\u6574\u4e2a\u6676\u5706\u4f1a\u51fa\u73b0\u7fd8\u66f2\uff0c\u51fa\u73b0\u503e\u659c\u89d2\uff08Off\uff09\u3002<\/p>\n

\u6b64\u5916\uff0c\u6709\u4e00\u79cd\u540d\u4e3a\u201c\u6c28\u70ed\u6cd5\uff08Ammono-thermal\uff09\u201d\u7684\u7ed3\u6676\u65b9\u6cd5\uff0c\u8be5\u65b9\u6cd5\u53ef\u751f\u6210\u9ad8\u8d28\u91cf\u7684\u7ed3\u6676\uff0c\u4e0d\u540c\u4e8e\u4f53\u5757\u5f0f\uff08Bulk\uff09\u6c2e\u5316\u9553\u6676\u5706\u91cf\u4ea7\u5de5\u827a\u4e2d\u4f7f\u7528\u7684\u201cHVPE\u201d\u6cd5\u3002\u201c\u6c28\u70ed\u6cd5\u201d\u4f5c\u4e3a\u4e00\u79cd\u751f\u6210\u4eba\u5de5\u6c34\u6676\u7ed3\u6676\u7684\u65b9\u6cd5\uff0c\u91c7\u7528\u7684\u662f\u6c34\u70ed\u5408\u6210\u6cd5\uff08\u5df2\u5b9e\u73b0\u5de5\u4e1a\u5316\u5e94\u7528\uff09\u3002\u63d0\u9ad8\u538b\u529b\u5bb9\u5668\u5185\u6c28\u7684\u6e29\u5ea6\u548c\u538b\u529b\uff0c\u4f7f\u5176\u5904\u4e8e\u8d85\u4e34\u754c\u72b6\u6001\uff0c\u6eb6\u89e3\u6c2e\u5316\u9553\u591a\u7ed3\u6676\uff0c\u518d\u5728\u6c2e\u5316\u9553\u79cd\u6676\uff08Seed Crystal\uff09\u4e0a\u6c89\u6dc0\u51fa\u5355\u6676\u3002\u4ee5\u6c2e\u5316\u9553\u6676\u79cd\u4e3a\u57fa\u7840\u6750\u6599\u3001\u5e76\u91c7\u7528\u6db2\u76f8\u751f\u957f\u6cd5\uff0c\u53ef\u5236\u4f5c\u51fa\u9ad8\u8d28\u91cf\u7684\u5355\u7ed3\u6676\u3002\u201c\u4f46\u662f\uff0c\u5229\u7528\u6c28\u70ed\u6cd5\uff0c\u5728\u7ed3\u6676\u751f\u957f\u8fc7\u7a0b\u4e2d\uff0c\u4e00\u65e6\u51fa\u73b0\u7a33\u5b9a\u7684\u8868\u9762\uff0c\u5c31\u4f1a\u505c\u6b62\u751f\u957f\u3002\u57fa\u4e8e\u4e0a\u8ff0\u73b0\u8c61\u7684\u5b58\u5728\uff0c\u867d\u7136\u53ef\u4ee5\u5236\u4f5c4\u82f1\u5bf8\u6676\u5706\uff0c\u8981\u60f3\u5236\u4f5c\u51fa\u66f4\u5927\u5c3a\u5bf8\u7684\u6676\u5706\uff0c\u8fd8\u9700\u8981\u65f6\u95f4\u7684\u79ef\u7d2f\u3002\u201d\uff08\u68ee\u6559\u6388\uff09<\/p>\n

\u7136\u800c\uff0c\u4ee5\u5f80\u65e0\u6cd5\u5236\u4f5c\u51fa\u9ad8\u8d28\u91cf\u4f53\u5757\u5f0f\uff08Bulk\uff09\u6c2e\u5316\u9553\u6676\u5706\uff0c\u8fd1\u5e74\u6765\u60c5\u51b5\u6709\u4e86\u663e\u8457\u6539\u5584\u3002\u5df2\u7ecf\u786e\u7acb\u4e86\u53ef\u4ee5\u5236\u9020\u51fa\u9ad8\u8d28\u91cf\u3001\u4f4e\u6210\u672c\u4f53\u5757\u5f0f\uff08Bulk\uff09\u6c2e\u5316\u9553\u6676\u5706\u7684\u6280\u672f\u3002\u65e5\u672c\u5927\u962a\u5927\u5b66\u3001\u4e30\u7530\u5408\u6210\u682a\u5f0f\u4f1a\u793e\u5408\u4f5c\u7814\u53d1\u4e86\u4e00\u9879\u53ef\u89e3\u51b3\u4e0a\u8ff0\u8bfe\u9898\u7684\u65b0\u6280\u672f\uff08\u4e0b\u56fe2\uff09\uff0c\u8be5\u6280\u672f\u878d\u5408\u4e86\u201cNa Flux\u6cd5\uff08\u94a0\u52a9\u6eb6\u5242\u6cd5\uff0c\u5229\u7528\u8be5\u65b9\u6cd5\u751f\u957f\u6c2e\u5316\u9553\u7ed3\u6676\uff09\u201d\u548c\u201cPoint Seed \u6cd5\uff08\u70b9\u7c7d\u6676\u6cd5\uff0c\u5229\u7528\u8be5\u65b9\u6cd5\u5b9e\u73b0\u5927\u5c3a\u5bf8\u6676\u5706\uff09\u201d\u3002<\/p>\n

\"\"
<\/figcaption><\/figure>\n

\u56fe2\uff1a\u878d\u5408\u201cNa Flux\uff08\u94a0\u52a9\u6eb6\uff09\u6cd5\u201d\u548c\u201cPoint Seed\uff08\u70b9\u7c7d\u6676\uff09\u6cd5\u201d\uff0c\u4f7f\u5927\u5c3a\u5bf8\u4f53\u5757\u5f0f\uff08Bulk\uff09\u6c2e\u5316\u9553\u6676\u5706\u7684\u5236\u4f5c\u6210\u4e3a\u53ef\u80fd\u3002<\/p>\n

\uff08\u56fe\u7247\u51fa\u81ea\uff1a\u65e5\u672c\u5927\u962a\u5927\u5b66\uff09<\/p>\n

\u201cNa Flux\uff08\u94a0\u52a9\u6eb6\uff09\u6cd5\u201d\u6307\u7684\u662f\u5c06\u94a0\/\u9553\u6eb6\u6db2\u66b4\u9732\u4e8e\u6c14\u538b\u4e3a30\u4e00\u4e0040\u7684\u6c2e\u6c14\u4e2d\uff0c\u5c06\u6c2e\u6eb6\u89e3\u4e8e\u6eb6\u6db2\uff0c\u5e76\u4f7f\u5176\u6210\u4e3a\u9971\u548c\u72b6\u6001\uff0c\u4ece\u800c\u4f7f\u6c2e\u5316\u9553\u7ed3\u6676\u6790\u51fa\u3002\u8fd9\u662f\u65e5\u672c\u4e1c\u5317\u5927\u5b66\u5c71\u6839\u4e45\u5178\u6559\u6388\u4e8e1996\u5e74\u7814\u53d1\u51fa\u7684\u6280\u672f\u3002\u201cNa Flux\uff08\u94a0\u52a9\u6eb6\uff09\u6cd5\u201d\u7684\u7279\u70b9\u662f\uff0c\u5373\u4f7f\u6676\u79cd\u8d28\u91cf\u8f83\u4f4e\uff0c\u4e5f\u53ef\u4ee5\u5728\u5176\u8868\u9762\u5f62\u6210\u9ad8\u8d28\u91cf\u7684\u7ed3\u6676\u3002\u4f46\u662f\uff0c\u4ec5\u9760\u8be5\u65b9\u6cd5\uff0c\u867d\u7136\u53ef\u4ee5\u4f9d\u9760\u4e00\u4e2a\u5c0f\u70b9\u5f62\u6210\u5b8c\u7f8e\u7684\u7ed3\u6676\uff0c\u5374\u65e0\u6cd5\u5f62\u6210\u5927\u5c3a\u5bf8\u7ed3\u6676\u3002\u4e8e\u662f\uff0c\u5229\u7528\u201cPoint Seed\uff08\u70b9\u7c7d\u6676\uff09\u6cd5\u201d\uff0c\u5f62\u6210\u5927\u5c3a\u5bf8\u7684\u6676\u5706\u3002\u5373\u5728\u5927\u5757\u57fa\u6750\u4e0a\u5927\u9762\u79ef\u5206\u5e03\u6676\u79cd\uff0c\u5728\u7ed3\u6676\u751f\u957f\u8fc7\u7a0b\u4e2d\uff0c\u5206\u522b\u5408\u4f53\uff0c\u5f62\u6210\u5355\u7ed3\u6676\u3002<\/p>\n

\u636e\u68ee\u6559\u6388\u8868\u793a\uff0c\u5229\u7528\u4e0a\u8ff0\u65b9\u6cd5\uff0c\u53ef\u4ee5\u83b7\u5f97\u9002\u7528\u4e8e\u529f\u7387\u534a\u5bfc\u4f53\u91cf\u4ea7\u7684\u7406\u60f3\u7ed3\u6676\uff0c\u5176\u9519\u4f4d\u5bc6\u5ea6\u4e3a104\/cm2\u4ee5\u4e0b\uff0c6\u82f1\u5bf8\u6676\u5706\u503e\u659c\u89d2\u5206\u5e03\u4e3a0.2\u5ea6\u3002\u6b64\u5916\uff0c\u4e5f\u5df2\u7ecf\u6210\u529f\u5236\u6210\u4e866\u82f1\u5bf8\u4f53\u5757\u5f0f\uff08Bulk\uff09\u6c2e\u5316\u9553\u886c\u5e95\uff08\u8be5\u5c3a\u5bf8\u4e3a\u5168\u7403\u6700\u5927\uff09\u3002\u800c\u4e14\uff0c\u5982\u679c\u4f7f\u7528\u5c3a\u5bf8\u66f4\u5927\u7684\u57fa\u6750\u3001\u66f4\u591a\u7684\u6676\u79cd\u7684\u8bdd\uff0c\u8fd8\u53ef\u4ee5\u5236\u4f5c\u51fa10\u82f1\u5bf8\u6676\u5706\uff0c\u4e14\u751f\u4ea7\u91cf\u4e0d\u4f1a\u964d\u4f4e\u3002<\/p>\n

\u6b64\u5916\uff0c\u8fd8\u6709\u53e6\u4e00\u79cd\u65b9\u6cd5\uff0c\u5373\u4ee5\u4f53\u5757\u5f0f\uff08Bulk\uff09\u6c2e\u5316\u9553\u886c\u5e95\u4e3a\u6676\u79cd\uff0c\u4f7f\u7528\u201c\u6c28\u70ed\u6cd5\u201d\uff0c\u53ef\u5236\u4f5c\u51fa\u9ad8\u8d28\u91cf\u3001\u5927\u5c3a\u5bf8\u7684\u4f53\u5757\u5f0f\uff08Bulk\uff09\u886c\u5e95\uff08\u5982\u4e0b\u56fe3\uff09\u3002\u9488\u5bf9\u4e0a\u8ff0\u65b9\u6cd5\uff0c\u68ee\u6559\u6388\u6307\u51fa\uff1a\u201c\u6210\u672c\u582a\u6bd4\u73b0\u6709\u7684\u78b3\u5316\u7845\u886c\u5e95\uff0c\u4e14\u53ef\u4ee5\u5b9e\u73b0\u8f83\u5927\u5c3a\u5bf8\u3002\u201d\u65e5\u672c\u5927\u962a\u5927\u5b66\u548c\u4e30\u7530\u5408\u6210\u682a\u5f0f\u4f1a\u793e\u7b49\u4f01\u4e1a\u5df2\u7ecf\u53c2\u52a0\u65e5\u672c\u73af\u5883\u7701\u63d0\u51fa\u7684\u201c\u4ee4\u548c\u56db\u5e74\u5ea6 \u4e3a\u8fdb\u4e00\u6b65\u5b9e\u73b0\u78b3\u4e2d\u548c\uff0c\u52a0\u901f\u63a8\u8fdb\u5e94\u7528\u548c\u666e\u53ca\u96f6\u90e8\u4ef6\u548c\u6750\u6599\u201d\u9879\u76ee\uff0c\u8fd1\u671f\uff0c\u4e09\u83f1\u5316\u5b66\u682a\u5f0f\u4f1a\u793e\uff08\u62e5\u6709\u201c\u6c28\u70ed\u6cd5\u201d\u6280\u672f\uff09\u4e5f\u52a0\u5165\u4e86\u8be5\u9879\u76ee\uff0c\u8bf8\u591a\u4f01\u4e1a\u7684\u52a0\u5165\u5c06\u66f4\u6709\u52a9\u4e8e\u9879\u76ee\u7684\u5b9e\u65bd\u548c\u9a8c\u8bc1\u3002<\/p>\n

\"\"
<\/figcaption><\/figure>\n

\u56fe3\uff1a\u878d\u5408\u201cNa Flux\uff08\u94a0\u52a9\u6eb6\uff09\u6cd5\u201d\u548c\u201c\u6c28\u70ed\u6cd5\u201d\u3002\u201cNa Flux\uff08\u94a0\u52a9\u6eb6\uff09\u6cd5\u201d\u7684\u4f18\u52bf\u662f\u53ef\u4f7f\u6676\u5706\u5b9e\u73b0\u8f83\u5927\u7684\u5c3a\u5bf8\u3001\u8f83\u9ad8\u7684\u8d28\u91cf\uff1b\u201c\u6c28\u70ed\u6cd5\u201d\u7684\u4f18\u52bf\u662f\u53ef\u63d0\u9ad8\u6676\u5706\u8d28\u91cf\u3002\u4e8c\u8005\u878d\u5408\u540e\uff0c\u53ef\u4ee5\u83b7\u5f97\u6bd4\u78b3\u5316\u7845\u6210\u672c\u66f4\u4f4e\u7684\u7684\u6c2e\u5316\u9553\u6676\u5706\u3002<\/p>\n

\uff08\u56fe\u7247\u51fa\u81ea\uff1a\u65e5\u672c\u5927\u962a\u5927\u5b66\uff09<\/p>\n

\u53ef\u6210\u529f\u63d0\u9ad8\u5143\u4ef6\u7684\u6027\u80fd\u3001\u826f\u7387<\/strong><\/p>\n

\u636e\u68ee\u6559\u6388\u8868\u793a\uff0c\u4f7f\u7528\u7531\u201cNa Flux\uff08\u94a0\u52a9\u6eb6\uff09\u6cd5\u201d\u548c\u201cPoint Seed\uff08\u70b9\u7c7d\u6676\uff09\u6cd5\u201d\u5236\u6210\u7684\u6c2e\u5316\u9553\u886c\u5e95\u540e\u53d1\u73b0\uff0c\u6c2e\u5316\u9553\u5143\u4ef6\u7684\u6027\u80fd\u3001\u826f\u7387\u666e\u904d\u5f97\u5230\u63d0\u9ad8\u3002<\/p>\n

\u65e5\u672c\u5927\u962a\u5927\u5b66\u548c\u677e\u4e0b\u96c6\u56e2\u5408\u4f5c\uff0c\u5229\u7528Na Flux\uff08\u94a0\u52a9\u6eb6\uff09\u6cd5\uff0c\u4ee5\u4f53\u5757\uff08Bulk\uff09\u886c\u5e95\u4e3a\u57fa\u7840\u5236\u4f5c\u4e86\u7eb5\u578b\u6c2e\u5316\u9553FET\uff0c\u5e76\u4ece\u82af\u7247OFF\u6027\u80fd\u7684\u89d2\u5ea6\u8003\u5bdf\u4e86\u6210\u54c1\u7387\uff08\u4e0b\u56fe4\uff09\u3002\u4ee5\u5e02\u573a\u4e0a\u9500\u552e\u7684\u6c2e\u5316\u9553\u886c\u5e95\u5236\u6210\u82af\u7247\u7684\u6210\u54c1\u7387\u4ec5\u4e3a33%\uff0c\u800c\u5229\u7528\u4e0a\u8ff0\u65b9\u6cd5\uff0c\u5219\u53ef\u4f7f\u6210\u54c1\u7387\u5927\u5e45\u5ea6\u63d0\u5347\u81f372%\u3002\u6b64\u5916\uff0c\u4e0a\u8ff0\u6210\u679c\u662f\u57fa\u4e8e\u5b9e\u9a8c\u5ba4\u57fa\u7840\u83b7\u5f97\u7684\uff0c\u672a\u6765\u8fd8\u6709\u5f88\u5927\u63d0\u5347\u4f59\u5730\u3002<\/p>\n

\"\"
<\/figcaption><\/figure>\n

\u56fe4\uff1a\u5229\u7528\u201cNa Flux\uff08\u94a0\u52a9\u6eb6\uff09\u6cd5\u201d\u548c\u201cPoint Seed\uff08\u70b9\u7c7d\u6676\uff09\u6cd5\u201d\u53ef\u5236\u4f5c\u51fa\u9ad8\u8d28\u91cf\u3001\u5927\u5c3a\u5bf8\u7684\u6c2e\u5316\u7845\u886c\u5e95\u3002<\/p>\n

\uff08\u56fe\u7247\u51fa\u81ea\uff1a\u65e5\u672c\u5927\u962a\u5927\u5b66\uff09<\/p>\n

\u6b64\u5916\uff0c\u7814\u7a76\u4eba\u5458\u5df2\u7ecf\u5f00\u59cb\u5229\u7528\u201cOVPE\u6cd5\uff08Oxide Vapor Phase Epitaxy\uff0c\u6c27\u5316\u7269\u6c14\u76f8\u5916\u5ef6\u6cd5\uff0c\u7b80\u79f0\u4e3a\uff1aOVPE\uff0c\u53ef\u7528\u4e8e\u5236\u4f5c\u8d85\u4f4e\u7535\u963b\u7684\u6676\u5706\uff0c\u7531\u65e5\u672c\u5927\u962a\u5927\u5b66\u7814\u53d1\u3001\u677e\u4e0b\u96c6\u56e2\u63a8\u8fdb\u5176\u5b9e\u7528\u5316\uff09\u201d\uff0c\u5728\u7531\u201cNa Flux\uff08\u94a0\u52a9\u6eb6\uff09\u6cd5\u201d\u548c\u201cPoint Seed\uff08\u70b9\u7c7d\u6676\uff09\u6cd5\u201d\u5236\u6210\u7684\u6676\u79cd\u4e0a\u751f\u957f\u6c2e\u5316\u9553\u7ed3\u6676\uff0c\u4ee5\u7814\u53d1\u66f4\u9ad8\u6027\u80fd\u7684\u7eb5\u578b\u6c2e\u5316\u9553FET\u3002\u5236\u6210\u7684\u6676\u5706\u7684\u7535\u963b\u7ea6\u4e3a10-4\u03a9cm2\uff0c\u8fdc\u4f4e\u4e8e\u78b3\u5316\u7845\u6676\u5706\uff0810-3\u03a9cm2\u5de6\u53f3\uff09\u3001\u9519\u4f4d\u5bc6\u5ea6\u4e3a104\/cm2\u3001\u6c2e\u5316\u9553\u819c\u539a\u8d85\u8fc71\u6beb\u7c73\u3002<\/p>\n

\u7814\u7a76\u4eba\u5458\u83b7\u5f97\u4e86\u4e00\u5757\u6676\u5706\uff0c\u8be5\u6676\u5706\u6709\u671b\u5b9e\u73b0\u7eb5\u578bFET\u3002\u4e0e\u78b3\u5316\u7845\u57fa\u7684\u7eb5\u578bMOS FET\u76f8\u6bd4\uff0c\u5728\u6027\u80fd\u65b9\u9762\uff0c\u7eb5\u578bFET\u5177\u6709\u66f4\u9ad8\u7684\u6f5c\u529b\uff08\u4e0b\u56fe5\uff09\u3002\u4e0e\u5229\u7528\u4f20\u7edf\u7684\u4f53\u5757\u5f0f\u6c2e\u5316\u9553\u6676\u5706\u5236\u6210\u7684\u82af\u7247\u76f8\u6bd4\uff0c\u5b9e\u9a8c\u5236\u4f5c\u7684\u4e8c\u6781\u7ba1\u7684ON\u7535\u963b\u503c\u964d\u4f4e\u4e8650%\uff0c\u7eb5\u578bFET\u7684OFF\u7535\u963b\u503c\u964d\u4f4e\u4e8615%\uff08\u751a\u81f3\u66f4\u9ad8\uff09\u3002<\/p>\n

\"\"
<\/figcaption><\/figure>\n

\u56fe5\uff1a\u529f\u7387\u534a\u5bfc\u4f53\u7684\u6027\u80fd\u548c\u6676\u5706\u7279\u6027\u7684\u5173\u7cfb\u3002\u5229\u7528\u201cOVPE\u6cd5\u201d\uff0c\u53ef\u964d\u4f4e\u6676\u5706\u7684\u7535\u963b\u3002<\/p>\n

\uff08\u56fe\u7247\u51fa\u81ea\uff1a\u65e5\u672c\u5927\u962a\u5927\u5b66\uff09<\/p>\n

\u5728\u65e5\u672c\u73af\u5883\u7701\u7684\u9879\u76ee\u4e2d\uff0c\u4e3a\u5b9e\u73b0\u5728\u7535\u52a8\u6c7d\u8f66\u9a71\u52a8\u9006\u53d8\u5668\u4e2d\u7684\u5e94\u7528\uff0c\u65e5\u672c\u5927\u962a\u5927\u5b66\u7740\u529b\u7814\u53d1\u5177\u6709\u8d85\u4f4e\u7535\u963b\u3001\u9ad8\u8d28\u91cf\u3001\u5927\u5c3a\u5bf8\u7684\u4f53\u5757\u6c2e\u5316\u9553\u886c\u5e95\u4ee5\u53ca\u76f8\u5173\u5176\u4ed6\u4ea7\u54c1\u3001\u6a21\u7ec4\u3002\uff08\u4e0b\u56fe6\uff09<\/p>\n

\"\"
<\/figcaption><\/figure>\n

\u56fe6\uff1a\u8d85\u4f4e\u7535\u963b\u3001\u9ad8\u8d28\u91cf\u3001\u5927\u5c3a\u5bf8\u7684\u4f53\u5757\u6c2e\u5316\u9553\u6676\u5706\u3001\u4ee5\u53ca\u76f8\u5173\u5e94\u7528\u3001\u6a21\u7ec4\u7684\u5f00\u53d1\u8ba1\u5212\u3002<\/p>\n

\uff08\u56fe\u7247\u51fa\u81ea\uff1a\u65e5\u672c\u5927\u962a\u5927\u5b66\uff09<\/p>\n

\uff08\u6587\uff1a\u534a\u5bfc\u4f53\u884c\u4e1a\u89c2\u5bdf \u4f5c\u8005\u65e5\u7ecfXTECH\uff09<\/p>\n

\u66f4\u591aSiC\u548cGaN\u7684\u5e02\u573a\u8d44\u8baf\uff0c\u8bf7\u5173\u6ce8\u5fae\u4fe1\u516c\u4f17\u8d26\u53f7\uff1a\u96c6\u90a6\u5316\u5408\u7269\u534a\u5bfc\u4f53\u3002<\/strong><\/p>\n","protected":false},"excerpt":{"rendered":"

\u5982\u4eca\uff0c\u4ee5\u78b3\u5316\u7845\uff08SiC\uff09\u3001\u6c2e\u5316\u9553\uff08GaN\uff09\u7b49\u201cWBG\uff08Wide Band Gap\uff0c\u5bbd\u7981\u5e26\uff0c\u4ee5\u4e0b\u7b80\u79f0\u4e3a\uff1aWBG\uff09 […]<\/p>\n","protected":false},"author":118,"featured_media":0,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[873],"tags":[994],"_links":{"self":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/63002"}],"collection":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/users\/118"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/comments?post=63002"}],"version-history":[{"count":1,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/63002\/revisions"}],"predecessor-version":[{"id":63009,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/63002\/revisions\/63009"}],"wp:attachment":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/media?parent=63002"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/categories?post=63002"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/tags?post=63002"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}