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1\u3001\u6fc0\u5149\u6676\u5706\u6807\u8bb0\u5e94\u7528<\/p>\n

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2\u3001\u6fc0\u5149\u80cc\u91d1\u53bb\u9664\u52a0\u5de5\u5de5\u827a<\/p>\n

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\"\"
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[1] Lingfeng Wang, Chen Zhang, Feng Liu, Huai Zheng, Gary J. Cheng. Process mechanism of ultrafast laser multi-focal-scribing for ultrafine and effcient stealth dicing of SiC wafers. J. Appl. Phys. 2022, 128: 872. \uff08\u534e\u5de5\u6fc0\u5149\u7cbe\u5bc6\u4e8b\u4e1a\u7fa4\u4e0e\u6b66\u6c49\u5927\u5b66\u5408\u4f5c\u5b8c\u6210\uff0c\u79d1\u6280\u90e8\u9879\u76ee\u540d\u79f0\uff1a\u9762\u5411IC\u7684\u8d85\u5feb\u6fc0\u5149\u9ad8\u7cbe\u5bc6\u5207\u5272\u6280\u672f\u4e0e\u88c5\u5907\uff09<\/p>\n

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